Integration and electrical evaluation of WS(2) and MoS(2) fets in a 300 mm pilot line
在300毫米中试生产线上对WS(2)和MoS(2)场效应晶体管进行集成和电学评估
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doi:10.1007/s44291-026-00164-4
Schram, T; Smets, Q; Opdebeeck, A; Ghosh, S; Groven, B; Kumar, P; Medina, H M; Cott, D; deMarneffe, J-F; Dongre, H; Kruv, A; Panarella, L; Pinotti, L F; Morin, P; Kar, G S; Lockhart de la Rosa, C J