Stress-Induced Directed Self-Assembly of Perpendicularly Oriented Block Copolymer Lamellae for Lithographic Density Multiplication
应力诱导垂直取向嵌段共聚物片层的定向自组装用于光刻密度倍增
期刊:ACS Applied Materials & Interfaces
影响因子:8.2
doi:10.1021/acsami.5c14351
Panda, Aum Sagar; Tung, Cheng-Hsun; Chuang, Jui-Chang; Nguyen, The Anh; Trinh, Thuy; Chen, Pin-Chia; Shastry, Thanmayee; Chen, Fu-Rong; Lee, Ming-Chang; Lee, Chang-Chun; Ho, Rong-Ming