Effects of β-Si(3)N(4) Seeds on Microstructure and Performance of Si(3)N(4) Ceramics in Semiconductor Package
β-Si₃N₄晶种对半导体封装中Si₃N₄陶瓷微观结构和性能的影响
期刊:Materials
影响因子:3.2
doi:10.3390/ma16124461
Shen, Qiang; Lin, Zhijie; Deng, Junjie; Chen, Hongxiang; Chen, Xuan; Tian, Jun; Bao, Biliang; Dai, Pinqiang; Sun, Xudong