Near-field terahertz time-domain spectroscopy for in-line electrical metrology of semiconductor integration processes for memory
用于存储器半导体集成工艺在线电学计量的近场太赫兹时域光谱技术
期刊:Communications Engineering
影响因子:
doi:10.1038/s44172-025-00356-y
Jun, Sunhong; Baek, Inkeun; Park, Suhwan; Choi, Eun Hyuk; Yoon, Jongmin; Jeon, Iksun; Jang, Yoonkyung; Priwisch, Martin; Kim, Wontae; Kim, Suncheul; Kim, Taejoong; Jo, Taeyong; Lee, Myungjun; Ryu, Sungyoon; Koo, Namil; Yang, Yusin
