Laser Ultrasound Investigations of AlScN(0001) and AlScN(11-20) Thin Films Prepared by Magnetron Sputter Epitaxy on Sapphire Substrates
利用磁控溅射外延法在蓝宝石衬底上制备AlScN(0001)和AlScN(11-20)薄膜的激光超声研究
期刊:Micromachines
影响因子:3
doi:10.3390/mi13101698
Mayer, Elena A; Rogall, Olga; Ding, Anli; Nair, Akash; Žukauskaitė, Agnė; Pupyrev, Pavel D; Lomonosov, Alexey M; Mayer, Andreas P
