Annealing and passivation study of germanium on silicon (GOS) mid-infrared waveguide for sensing applications
用于传感应用的硅基锗(GOS)中红外波导的退火和钝化研究
期刊:Scientific Reports
影响因子:3.9
doi:10.1038/s41598-026-35766-1
Ang, Rachel C F; Goh, Jia Sheng; Tobing, Landobasa Y M; Lim, Leh Woon; Tong, Amy S K; Fong, Andrew W K; Chen, Zhixian; Ng, Doris K T