3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI
基于腔体SOI的高频AlN基PMUT阵列的三维有限元分析
期刊:Sensors
影响因子:3.5
doi:10.3390/s19204450
Liu, Wenjuan; He, Leming; Wang, Xubo; Zhou, Jia; Xu, Weijiang; Smagin, Nikolay; Toubal, Malika; Yu, Hao; Gu, Yuandong; Xu, Jinghui; Remiens, Denis; Ren, Junyan
