Compensation of the Stress Gradient in Physical Vapor Deposited Al(1-x)Sc(x)N Films for Microelectromechanical Systems with Low Out-of-Plane Bending
物理气相沉积Al(1-x)Sc(x)N薄膜应力梯度补偿及其在微机电系统中实现低面外弯曲
期刊:Micromachines
影响因子:3
doi:10.3390/mi13081169
Beaucejour, Rossiny; D'Agati, Michael; Kalyan, Kritank; Olsson, Roy H 3rd
