New Volatile Tantalum Imido Precursors with Carboxamide Ligands
具有羧酰胺配体的新型挥发性钽酰亚胺前体
期刊:ACS Omega
影响因子:3.7
doi:10.1021/acsomega.1c03659
Jeong Min Hwang, Sung Kwang Lee, Sunyoung Shin, Ji-Seoung Jeong, Hae Sun Kim, Ji Yeon Ryu, Taeyong Eom, Bo Keun Park, Chang Gyoun Kim, Taek-Mo Chung
