Wafer-level vapor cells filled with laser-actuated hermetic seals for integrated atomic devices
用于集成原子器件的晶圆级气室,填充有激光驱动的密封件。
期刊:Microsystems & Nanoengineering
影响因子:9.9
doi:10.1038/s41378-022-00468-x
Maurice, Vincent; Carlé, Clément; Keshavarzi, Shervin; Chutani, Ravinder; Queste, Samuel; Gauthier-Manuel, Ludovic; Cote, Jean-Marc; Vicarini, Rémy; Abdel Hafiz, Moustafa; Boudot, Rodolphe; Passilly, Nicolas