Ion-beam assisted sputtering of titanium nitride thin films
离子束辅助溅射氮化钛薄膜
期刊:Scientific Reports
影响因子:3.9
doi:10.1038/s41598-023-31549-0
Draher, Timothy; Polakovic, Tomas; Li, Juliang; Li, Yi; Welp, Ulrich; Jiang, Jidong Samuel; Pearson, John; Armstrong, Whitney; Meziani, Zein-Eddine; Chang, Clarence; Kwok, Wai-Kwong; Xiao, Zhili; Novosad, Valentine