Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications
用于MEMS和NEMS应用的悬浮硅质量块石墨烯膜的制造和表征
期刊:Microsystems & Nanoengineering
影响因子:9.9
doi:10.1038/s41378-019-0128-4
Fan, Xuge; Smith, Anderson D; Forsberg, Fredrik; Wagner, Stefan; Schröder, Stephan; Akbari, Sayedeh Shirin Afyouni; Fischer, Andreas C; Villanueva, Luis Guillermo; Östling, Mikael; Lemme, Max C; Niklaus, Frank
