On the Feasibility of Fan-Out Wafer-Level Packaging of Capacitive Micromachined Ultrasound Transducers (CMUT) by Using Inkjet-Printed Redistribution Layers
利用喷墨打印重分布层实现电容式微机械超声换能器(CMUT)扇出型晶圆级封装的可行性研究
期刊:Micromachines
影响因子:3
doi:10.3390/mi11060564
Roshanghias, Ali; Dreissigacker, Marc; Scherf, Christina; Bretthauer, Christian; Rauter, Lukas; Zikulnig, Johanna; Braun, Tanja; Becker, Karl-F; Rzepka, Sven; Schneider-Ramelow, Martin