Scavenger with Protonated Phosphite Ions for Incredible Nanoscale ZrO(2)-Abrasive Dispersant Stability Enhancement and Related Tungsten-Film Surface Chemical-Mechanical Planarization
含质子化亚磷酸根离子的清除剂可显著提高纳米级ZrO₂磨料分散剂的稳定性,并用于相关的钨膜表面化学机械平坦化。
期刊:Nanomaterials
影响因子:4.3
doi:10.3390/nano11123296
Kim, Seong-In; Jeong, Gi-Ppeum; Lee, Seung-Jae; Lee, Jong-Chan; Lee, Jun-Myeong; Park, Jin-Hyung; Bae, Jae-Young; Park, Jea-Gun