In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection
用于纳米颗粒质量检测的平面内和平面外MEMS压阻式悬臂梁传感器
期刊:Sensors
影响因子:3.5
doi:10.3390/s20030618
Setiono, Andi; Bertke, Maik; Nyang'au, Wilson Ombati; Xu, Jiushuai; Fahrbach, Michael; Kirsch, Ina; Uhde, Erik; Deutschinger, Alexander; Fantner, Ernest J; Schwalb, Christian H; Wasisto, Hutomo Suryo; Peiner, Erwin