Ultra-wide-field imaging Mueller matrix spectroscopic ellipsometry for semiconductor metrology
用于半导体计量学的超宽场成像穆勒矩阵光谱椭偏仪
期刊:Nature Communications
影响因子:15.7
doi:10.1038/s41467-025-63511-1
Oh, Juntaek; Son, Jaehyeon; Yoon, Changhyeong; Hwang, Eunsoo; Ahn, Jinwoo; Lee, Jaewon; Lee, Jinsoo; Shin, Jiyong; Lee, Donggun; Lim, Seunga; Ahn, Jeongho; Sohn, Younghoon; Hyun, Sangjin; Lee, Myungjun; Jo, Taeyong