Wafer-Scale Fabrication of Edge-Contacted Nanosheet Transistors via Alloying-Mediated Phase Engineering
通过合金化介导的相工程实现晶圆级边缘接触纳米片晶体管的制造
期刊:Small Science
影响因子:8.3
doi:10.1002/smsc.202500320
Jang, Sora; Song, Seunguk; Han, Juwon; Yoon, Aram; Wang, Jaewon; Lee, Hyeonwoo; Jin, Young Ho; Sim, Yeoseon; Lee, Zonghoon; Jeong, Changwook; Kwon, Soon-Yong