High-Density Vertical Transistors with Pitch Size Down to 20 nm
间距低至 20 纳米的高密度垂直晶体管
期刊:Advanced Science
影响因子:14.1
doi:10.1002/advs.202302760
Xiao, Zhaojing; Liu, Liting; Chen, Yang; Lu, Zheyi; Yang, Xiaokun; Gong, Zhenqi; Li, Wanying; Kong, Lingan; Ding, Shuimei; Li, Zhiwei; Lu, Donglin; Ma, Likuan; Liu, Songlong; Liu, Xiao; Liu, Yuan
