Effect of Mask Geometry Variation on Plasma Etching Profiles
掩模几何形状变化对等离子刻蚀轮廓的影响
期刊:Micromachines
影响因子:3
doi:10.3390/mi14030665
Bobinac, Josip; Reiter, Tobias; Piso, Julius; Klemenschits, Xaver; Baumgartner, Oskar; Stanojevic, Zlatan; Strof, Georg; Karner, Markus; Filipovic, Lado
