Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography
利用深紫外浸没式光刻技术制造的超材料工程硅分束器
期刊:Nanomaterials
影响因子:4.3
doi:10.3390/nano11112949
Vakarin, Vladyslav; Melati, Daniele; Dinh, Thi Thuy Duong; Le Roux, Xavier; Kan, Warren Kut King; Dupré, Cécilia; Szelag, Bertrand; Monfray, Stéphane; Boeuf, Frédéric; Cheben, Pavel; Cassan, Eric; Marris-Morini, Delphine; Vivien, Laurent; Alonso-Ramos, Carlos Alberto