Self-Aligned Crystallographic Multiplication of Nanoscale Silicon Wedges for High-Density Fabrication of 3D Nanodevices
用于高密度制造三维纳米器件的纳米级硅楔自对准晶体学倍增
期刊:ACS Applied Nano Materials
影响因子:5.5
doi:10.1021/acsanm.2c04079
Berenschot, Erwin; Tiggelaar, Roald M; Borgelink, Bjorn; van Kampen, Chris; Deenen, Cristian S; Pordeli, Yasser; Witteveen, Haye; Gardeniers, Han J G E; Tas, Niels R