Synthesis of heteroleptic [Sr(ddemap)(tmhd)](2) and its use in atomic layer deposition of low carbon SrO thin films
合成杂配体[Sr(ddemap)(tmhd)](2)及其在低碳SrO薄膜原子层沉积中的应用
期刊:RSC Advances
影响因子:4.6
doi:10.1039/d5ra08373g
Lee, Yeji; Park, Chanwoo; Jeong, Sangyeon; Lim, Daeun; Kim, Jonghyun; Kim, Hyeongjun; Kim, Eun A; Cho, Seong-Yong; Yoo, Hyobin; Park, Bo Keun; Chung, Teak-Mo; Lee, Woongkyu