High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate
采用溅射铌酸钾钠的高声压压电微机械超声换能器
期刊:Microsystems & Nanoengineering
影响因子:9.9
doi:10.1038/s41378-024-00841-y
Xia, Fan; Peng, Yande; Yue, Wei; Luo, Mingze; Teng, Megan; Chen, Chun-Ming; Pala, Sedat; Yu, Xiaoyang; Ma, Yuanzheng; Acharya, Megha; Arakawa, Ryuichi; Martin, Lane W; Lin, Liwei
