Evaluating scanning electron microscopy for the measurement of small-scale topography
评估扫描电子显微镜在小尺度形貌测量中的应用
期刊:Surface Topography-Metrology and Properties
影响因子:2.4
doi:10.1088/2051-672x/ad49b9
Chadha, Vimanyu; Miller, Nathaniel C; Ding, Ruikang; Beschorner, Kurt E; Jacobs, Tevis D B