The Influence of Thermal Annealing on the Chemical Composition, Nanomechanical, and Nanotribological Properties of Tantalum Thin Films
热退火对钽薄膜化学成分、纳米力学和纳米摩擦学性能的影响
期刊:Micromachines
影响因子:3
doi:10.3390/mi16040427
Datta, Debottam; Eskandari, Ali; Syed, Junaid; Rai, Himanshu; Gosvami, Nitya Nand; Tsui, Ting Y
