In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon
利用非线性激光光刻技术在硅片深处制造芯片内微结构和光子器件
期刊:Nature Photonics
影响因子:32.9
doi:10.1038/s41566-017-0004-4
Tokel, Onur; Turnali, Ahmet; Makey, Ghaith; Elahi, Parviz; Çolakoğlu, Tahir; Ergeçen, Emre; Yavuz, Özgün; Hübner, René; Borra, Mona Zolfaghari; Pavlov, Ihor; Bek, Alpan; Turan, Raşit; Kesim, Denizhan Koray; Tozburun, Serhat; Ilday, Serim; Ilday, F Ömer
