Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor
聚酰亚胺/SU-8导管尖端MEMS压力传感器
期刊:Biomedical Microdevices
影响因子:3.3
doi:10.1007/s10544-012-9661-8
Hasenkamp, Willyan; Forchelet, David; Pataky, Kristopher; Villard, Jimmy; Van Lintel, Harald; Bertsch, Arnaud; Wang, Qing; Renaud, Philippe