Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism
利用氦离子显微镜对超薄层进行成像:采用通道对比机制
期刊:Beilstein Journal of Nanotechnology
影响因子:2.7
doi:10.3762/bjnano.3.58
Hlawacek, Gregor; Veligura, Vasilisa; Lorbek, Stefan; Mocking, Tijs F; George, Antony; van Gastel, Raoul; Zandvliet, Harold J W; Poelsema, Bene