Mirrorless MEMS imaging: a nonlinear vibrational approach utilizing aerosol-jetted PZT-actuated fiber MEMS scanner for microscale illumination
无镜MEMS成像:一种利用气溶胶喷射PZT驱动光纤MEMS扫描器进行微尺度照明的非线性振动方法
期刊:Microsystems & Nanoengineering
影响因子:9.9
doi:10.1038/s41378-023-00646-5
Wang, Wei-Chih; Li, Ming-Yao; Peng, Kuan-Chang; Hsu, Yi-Feng; Estroff, Benjamin; Yen, Pao-Yun; Schipf, David; Wu, Wen-Jong