25 nm-Feature, 10(4)-aspect-ratio, 10 mm(2)-area single-pulsed laser nanolithography
25 nm 特征尺寸、10⁴ 纵横比、10 mm² 面积的单脉冲激光纳米光刻
期刊:Nature Communications
影响因子:15.7
doi:10.1038/s41467-025-62426-1
Chen, Zhi; Zhong, Lijing; Sun, Xiangyu; Fu, Yihui; He, Huilin; Ji, Huijiao; Wang, Yuying; Liu, Xiaofeng; Xu, Beibei; Wu, Zhemin; Zou, Chen; Ma, Zhijun; Zhang, Jingyu; Dong, Guoping; Barillaro, Giuseppe; Qiu, Cheng-Wei; Qiu, Jianbei; Qiu, Jianrong