Bridging piezoelectric and electrostatic effects: a novel piezo-MEMS pitch/roll gyroscope with sub 10°/h bias instability
结合压电效应和静电效应:一种新型压电-MEMS俯仰/横滚陀螺仪,偏置不稳定性低于10°/h
期刊:Microsystems & Nanoengineering
影响因子:9.9
doi:10.1038/s41378-024-00773-7
Qi, Zhenxiang; Wang, Bowen; Zhai, Zhaoyang; Wang, Zheng; Xiong, Xingyin; Yang, Wuhao; Bie, Xiaorui; Wang, Yao; Zou, Xudong