Silicon-Controlled Rectifier Embedded Diode for 7 nm FinFET Process Electrostatic Discharge Protection
用于 7 纳米 FinFET 工艺的硅控整流器嵌入式二极管,具有静电放电保护功能
期刊:Nanomaterials
影响因子:4.3
doi:10.3390/nano12101743
Zhu, Xinyu; Dong, Shurong; Yu, Fangjun; Deng, Feifan; Shubhakar, Kalya; Pey, Kin Leong; Luo, Jikui