Chemically tailored block copolymers for highly reliable sub-10-nm patterns by directed self-assembly
通过定向自组装化学定制嵌段共聚物，实现高可靠性的 10 纳米以下图案
期刊:Nature Communications
影响因子:14.7
doi:10.1038/s41467-024-49839-0
Shinsuke Maekawa, Takehiro Seshimo, Takahiro Dazai, Kazufumi Sato, Kan Hatakeyama-Sato, Yuta Nabae, Teruaki Hayakawa
