Extreme Ultraviolet Photoresponse of Organotin-Based Photoresists with Borate Counteranions
含硼酸根阴离子的有机锡基光刻胶的极紫外光响应
期刊:ACS Applied Materials & Interfaces
影响因子:8.2
doi:10.1021/acsami.4c08636
Evrard, Quentin; Sadegh, Najmeh; Mathew, Simon; Zuidinga, Ed; Watts, Benjamin; Paradiz Dominguez, Maximilian; Giglia, Angelo; Mahne, Nicola; Nannarone, Stefano; Nishimura, Akira; Goya, Tsuyoshi; Sugioka, Takuo; Vockenhuber, Michaela; Ekinci, Yasin; Brouwer, Albert M