Two-photon lithography (TPL) is a versatile technology for additive manufacturing of 2D and 3D micro/nanostructures with sub-wavelength resolved features. Recent advancement in laser technology has enabled the application of TPL fabricated structures in several fields such as microelectronics, photonics, optoelectronics, microfluidics, and plasmonic devices. However, the lack of two-photon polymerizable resins (TPPRs) induces bottleneck to the growth of TPL to its true potential, and hence continuous research efforts are focused on developing efficient TPPRs. In this article, we review the recent advancements in PI and TPPR formulation and the impact of process parameters on fabrication of 2D and 3D structures for specific applications. The fundamentals of TPL are described, followed by techniques used for achieving improved resolution and functional micro/nanostructures. Finally, a critical outlook and future prospects of TPPR formulation for specific applications are presented.
Two decades of two-photon lithography: Materials science perspective for additive manufacturing of 2D/3D nano-microstructures.
双光子光刻技术二十年:二维/三维纳米微结构增材制造的材料科学视角
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作者:Jaiswal Arun, Rastogi Chandresh Kumar, Rani Sweta, Singh Gaurav Pratap, Saxena Sumit, Shukla Shobha
| 期刊: | iScience | 影响因子: | 4.100 |
| 时间: | 2023 | 起止号: | 2023 Mar 11; 26(4):106374 |
| doi: | 10.1016/j.isci.2023.106374 | ||
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