A Theoretical Study on Static Gas Pressure Measurement via Circular Non-Touch Mode Capacitive Pressure Sensor.

A circular non-touch mode capacitive pressure sensor can operate in both transverse and normal uniform loading modes, but the elastic behavior of its movable electrode plate is different under the two different loading modes, making its input-output analytical relationships between pressure and capacitance different. This suggests that when such a sensor operates, respectively, in transverse and normal uniform loading modes, the theory of its numerical design and calibration is different, in other words, the theory for the transverse uniform loading mode (available in the literature) cannot be used as the theory for the normal uniform loading mode (not yet available in the literature). In this paper, a circular non-touch mode capacitive pressure sensor operating in normal uniform loading mode is considered. The elastic behavior of the movable electrode plate of the sensor under normal uniform loading is analytically solved with the improved governing equations, and the improved analytical solution obtained can be used to mathematically describe the movable electrode plate with larger elastic deflections, in comparison with the existing two analytical solutions in the literature. This provides a larger technical space for developing the circular non-touch mode capacitive pressure sensors used for measuring the static gas pressure (belonging to normal uniform loading).