Abstract
Metasurfaces, with their ability to finely manipulate light properties (e.g., polarization), represent a frontier in optical technology. Here, we report innovative gold-based metasurfaces that are adept at changing the light polarization across a broad range of incident angles. Their expansive acceptance angle facilitates seamless integration with silicon waveguides, culminating in the realization of a novel, compact, broadband, and low-loss on-chip polarization rotator. The demonstrated metasurface devices show polarization conversion efficiencies as high as 98.5% at 1550 nm in the free space measurements. Unlike conventional plasmonic metasurfaces, which lack broadband capabilities, our metasurface-based waveplates show extinction ratios of >15 dB for a 120 nm bandwidth. These metasurfaces are positioned on top of up-reflecting mirrors fabricated in a micrometer-scale silicon-on-insulator platform to demonstrate on-chip polarization rotation. The demonstrated polarization rotator shows an extinction ratio of more than 10 dB for a 100 nm bandwidth. This study marks the first successful demonstration of on-chip polarization manipulation utilizing metasurface integration, heralding significant potential impacts for enhancing the functionality and miniaturization of photonic integrated circuits.