Abstract
Aligned silver nanorod (AgNR) array films were fabricated by oblique thermal evaporation. The substrate temperature during evaporation was varied from 10 to 100 °C using a home-built water cooling system. Deposition angle and substrate temperature were found to be the most important parameters for the morphology of fabricated films. Especially, it was found that there exists a critical temperature at ~90 °C for the formation of the AgNR array. The highest enhancement factor of the surface-enhanced Raman scattering (SERS), observed in the Ag films coated with benzenethiol monolayer, was ~6 × 10(7). Hot spots, excited in narrow gaps between nanorods, were attributed to the huge enhancement factor by our finite-difference time-domain (FDTD) simulation reflecting the real morphology.