Abstract
Ultrasonic driven wireless charging technology has recently attracted much attention in the next generation bio-implantable systems; however, most developed ultrasonic energy harvesters are bulky and rigid and cannot be applied to general complex surfaces. Here, a flexible piezoelectric ultrasonic energy harvester (PUEH) array was designed and fabricated by integrating a large number of piezoelectric active elements with multilayered flexible electrodes in an elastomer membrane. The developed flexible PUEH device can be driven by the ultrasonic wave to produce continuous voltage and current outputs on both planar and curved surfaces, reaching output signals of more than 2 Vpp and 4 μA, respectively. Potential applications of using the flexible PUEH to charge energy-storage devices and power commercial electronics were demonstrated. Its low attenuation performance was also evaluated using the in vitro test of transmitting power through pork tissue, demonstrating its potential use in the next generation of wirelessly powered bio-implantable micro-devices.