Abstract
Brillouin-Raman combined confocal spectroscopy is a novel and powerful technique for providing non-contact and direct readout of the micro-regional chemical and mechanical properties of a material, and thus used in a broad range of applications, including material characterization in manufacturing and biological imaging. However, the inadequate spectral and spatial resolution restricts the further development of combined spectral technology. In this paper, an annular pupil confocal Brillouin-Raman microscopy (APCBRM) scheme is proposed to achieve high-spectral-resolution Brillouin spectral detection and high-lateral-resolution Brillouin, Raman, and 3D topography mapping. The use of an annular pupil significantly suppresses the spectral broadening caused by a high-numerical-aperture objective lens and compresses the full width at half maximum of the Brillouin spectrum by 22.1 %, effectively improving the Brillouin spectral resolution. In addition, the size of the excitation spot is compressed, and the lateral resolutions in Brillouin and Raman spectroscopy increased to about 353.2 nm and 347.1 nm, respectively. Thus, high lateral resolution and Brillouin spectral resolution are achieved simultaneously. Furthermore, the high-precision confocal focusing system based on reflected light realizes real-time focusing during scanning and three-dimensional topography mapping. These results demonstrate that APCBRM has excellent potential for applications in the fields of novel materials, precision machining, and biomedicine.