Abstract
Silica microlens arrays (MLAs) with multiple numerical-apertures (NAs) have high thermal and mechanical stability, and have potential application prospects in 3D display and rapid detection. However, it is still a challenge to rapidly fabricate silica MLAs with a larger range of NAs and how to obtain multiple NAs in the same aperture diameter. Here, a wet etching assisted spatially modulated femtosecond laser pulse fabricating technology is proposed. In this technology, Gaussian laser pulse is modulated in the axial direction to create a pulse with a large aspect ratio, which is used to modify the silica to obtain a longer modification distance than traditional technology. After that, a microlens with a larger NA can be obtained by etching, and the NA variable range can be up to 0.06-0.65, and even under the same aperture, the variable NA can range up to 0.45-0.65. In addition, a single focus is radially modulated into several focus with different axial lengths to achieve a single exposure fabricating of MLA with multiple NAs. In characterization of the image under a microscope, the multi-plane imaging characteristics of the MLA are revealed. The proposed technology offers great potential toward numerous applications, including microfluidic adaptive imaging and biomedical sensing.