Abstract
A robust and reliable method for enhancing the photoluminescence (PL) of multilayer MoS(2) is demonstrated using an oxygen plasma treatment process followed by laser exposure. Here, the plasma and laser treatments result in an indirect-to-direct band gap transition. The oxygen plasma creates a slight decoupling of the layers and converts some of the MoS(2) to MoO(3). Subsequent laser irradiation further oxidizes the MoS(2) to MoO(3), as confirmed via X-ray photoelectron spectroscopy, and results in localized regions of brightly luminescent MoS(2) monolayer triangular islands as seen in high-resolution transmission electron microscopy images. The PL lifetimes are found to decrease from 494 to 190 ps after plasma and laser treatment, reflecting the smaller size of the MoS(2) grains/regions. Atomic force microscopic imaging shows a 2 nm increase in thickness of the laser-irradiated regions, which provides further evidence of the MoS(2) being converted to MoO(3).