Abstract
Electromagnetic micro mirrors are in great demand for light detection and ranging (LiDAR) applications due to their light weight and low power consumption. The driven frequency of electromagnetic micro mirrors is very important to their performance and consumption. An electromagnetic micro mirror system is proposed in this paper. The model of the system was composed of a micro mirror, an integrated piezoresistive (PR) sensor, and a driving circuit was developed. The twisting angle of the mirror edge was monitored by an integrated PR sensor, which provides frequency feedback signals, and the PR sensor has good sensitivity and linearity in testing, with a maximum of 24.45 mV/deg. Stable sinusoidal voltage excitation and frequency tracking was realized via a phase-locked loop (PLL) in the driving circuit, with a frequency error within 10 Hz. Compared with other high-cost solutions using PLL circuits, it has greater advantages in power consumption, cost, and occupied area. The mechanical and piezoresistive properties of micro mirrors were performed in ANSYS 19.2 software. The behavior-level models of devices, circuits, and systems were validated by MATLAB R2023a Simulink, which contributes to the research on the large-angle deflection and low-power-consumption drive of the electromagnetic micro mirror. The maximum optical scan angle reached 37.6° at 4 kHz in the behavior-level model of the micro mirror.