Study and Characterization of Silicon Nitride Optical Waveguide Coupling with a Quartz Tuning Fork for the Development of Integrated Sensing Platforms

研究和表征氮化硅光波导与石英音叉耦合在集成传感平台开发中的应用

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Abstract

This work demonstrates an ultra-compact optical gas-sensing system, consisting of a pigtailed laser diode emitting at 1392.5 nm for water vapor (H(2)O) detection, a silicon nitride (Si(3)N(4)) optical waveguide to guide the laser light, and a custom-designed, low-frequency, and T-shaped Quartz Tuning Fork (QTF) as the sensitive element. The system employs both Quartz-Enhanced Photoacoustic Spectroscopy (QEPAS) and Light-Induced Thermoelastic Spectroscopy (LITES) techniques for trace gas sensing. A 3.8 mm-wide, S-shaped waveguide path was designed to prevent scattered laser light from directly illuminating the QTF. Both QEPAS and LITES demonstrated comparably low signal-to-noise ratios (SNRs), ranging from 1.6 to 3.2 for a 1.6% indoor H(2)O concentration, primarily owing to the reduced optical power (~300 μW) delivered to the QTF excitation point. These results demonstrate the feasibility of integrating photonic devices and piezoelectric components into portable gas-sensing systems for challenging environments.

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