Abstract
Non-dispersive infrared (NDIR) spectroscopy analyzes the concentration of target gases based on their characteristic infrared absorption. In conventional NDIR gas sensors, an infrared detector has to pair with a bandpass filter to select the target gas. However, multiplexed NDIR gas sensing requires multiple pairs of bandpass filters and detectors, which makes the sensor bulky and expensive. Here, we propose a multiplexed NDIR gas sensing platform consisting of a narrowband infrared detector array as read-out. By integrating plasmonic metamaterial absorbers with pyroelectric detectors at the pixel level, the detectors exhibit spectrally tunable and narrowband photoresponses, circumventing the need for separate bandpass filter arrays. We demonstrate the sensing of H(2)S, CH(4), CO(2), CO, NO, CH(2)O, NO(2), SO(2). The detection limits of common gases such as CH(4), CO(2), and CO are 63 ppm, 2 ppm, and 11 ppm, respectively. We also demonstrate the deduction of the concentrations of two target gases in a mixture.