Abstract
In this paper, multiple Fano resonances preferred in the refractive index sensing area are achieved based on sub-wavelength metal-insulator-metal (MIM) waveguides. Two slot cavities, which are placed between or above the MIM waveguides, can support the bright modes or the dark modes, respectively. Owing to the mode interferences, dual Fano resonances with obvious asymmetrical spectral responses are achieved. High sensitivity and high figure of merit are investigated by using the finite-difference time-domain (FDTD) method. In view of the development of chip-scale integrated photonics, two extra slot cavities are successively added to the structure, and consequently, three and four ultra-sharp Fano peaks with considerable performances are obtained, respectively. It is believed that this proposed structure can find important applications in the on-chip optical sensing and optical communication areas.