AlInGaAs Multiple Quantum Well-Integrated Device with Multifunction Light Emission/Detection and Electro-Optic Modulation in the Near-Infrared Range

近红外波段多功能光发射/探测及电光调制AlInGaAs多量子阱集成器件

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Abstract

A monolithic photonic chip with multifunctional light emission/detection and electro-optic modulation capabilities in the near-infrared range is proposed and realized on an InP-based wafer. Two identical AlInGaAs multiple quantum well (MQW) diodes operating independently as light emission/detection devices are fabricated using a two-step etching process on a single wafer and connected via a straight waveguide. The photocurrent induced in the MQW diode for the detection process is generated by the infrared light emitted by the MQW diode during the emission process and transmitted via the straight waveguide. The MQW diode has an electro-optic modulation characteristic, and its spectral responsivity exhibits a blueshift with an increasingly negative bias voltage under external infrared laser excitation. An on-chip communication test is conducted to study the potential applications of the proposed monolithic photonic chip for transmission of optical signals in the near-infrared range.

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