Abstract
Herein, a nanosensor structure is proposed, which comprises metal-insulator-metal (MIM) waveguide with stub and circular ring cavity with a stub (CRCS). The phenomenon of Fano resonance appears in the transmission spectrum, which is formed by interaction between the narrowband mode of CRCS and broadband mode of stub on bus waveguide. The influence of geometric asymmetry on mode splitting of Fano resonance was discussed. The mode splitting of Fano resonance can vastly improve figure of merit (FOM) with a sight decrease of sensitivity. The best performance of the refractive-index nanosensor is attained, which is 1420 nm/RIU with a high FOM of 76.76. Additionally, the application of designed structure on temperature sensing was investigated, which has sensitivity of 0.8 nm/°C. The proposed structure also possesses potential applications on other on-chip nanosensors.