Abstract
This article presents a novel method for fabricating repeatable and uniform surface-enhanced Raman scattering (SERS) substrates. The proposed method consists of two steps: (1) the fabrication of nanohole arrays using advanced femtosecond laser-induced two-photon polymerization (TPP) technology; and (2) the deposition of 9 nm thick silver nanoparticles on the nanohole arrays. The proposed nanohole arrays were optimized at the diameter, and the thickness of the silver film at two parameters. Regarding SERS substrates, a limit of detection of 10(-10) M (rhodamine 6G) and analytical enhancement factors up to 3.5 × 10(4) were achieved. At 1361 cm(-1), the relative standard deviation (RSD) of the characteristic peak was 5.5%, demonstrating a highly reproducible SERS substrate.