Abstract
Fresnel zone plates are frequently used as focusing and imaging optics in x-ray microscopy, as they provide the ease of use of normal incidence optics. We consider here the effects of tilt misalignment on their optical performance, both in the thin optics limit and in the case of zone plates that are sufficiently thick so that volume diffraction effects come into play. Using multislice propagation, we show that simple analytical models describe the tilt sensitivity of thin zone plates and the thickness at which volume diffraction must be considered, and examine numerically the performance of example zone plates for soft x-ray focusing at 0.5 keV and hard x-ray focusing at 10 keV.